| 摘要 |
PURPOSE:To perform an accurate positional detection for a boat by a method wherein the material having the light transmittance different from that of the material for a boat which gives no adverse effect for the diffusion process to be performed in a diffusion furnace is buried for the purpose of positional detection, and a protrusion is provided at a part of the boat. CONSTITUTION:A position detecting piece 11 consisting of silicon carbide material is buried in the position detecting part of a quartz boat 1. This burying work is performed in such a manner that a silicon carbide piece is loosely inserted in a notched part for position detection taking into consideration of thermal expansion difference of the related materials. According to this constitution, when the light emitted from a light emitting part 7 reaches the position detecting piece 11 buried in the quartz boat 1, the light is intercepted, and the photocurrent at the light-receiving part 8 is reduced suddenly, thereby enabling to perform a positional detection. |
