| 摘要 |
PURPOSE:In arranging and depicting a plurality of tips on a substrate, to beam off the blank part of a ultimate frame of the tip, and to set the quantity of transfer to the top frame of the subsequent tip at a predetermined distance thereby to minimize the blank between the tips. CONSTITUTION:In depicting a plurality of tips T1, T2, T3... on a substrate such as a mask divided into a plurality of frames F1, F2, F3..., the blank part shown oblique lines in the frame F3 depicted data corresponding to the ultimate frame F3 of the tip T1 are embedded with information to be beamed off. After the completion of exposure of the frame F3, the mask is shifted in the axial direction at a distance from the centerline C3 to C3', that is, a distance subtracting a width of the blank part from the width of one frame, and a frame F3' is made a top frame of the tip T2. Similarly hereinafter arranged tips are depicted in the full part of the substrate. By this procedure, while depicted data at every frame per one tip are used repeatedly, the arrangement interval can be made minimum. |
