| 摘要 |
PURPOSE:To increase the detection efficiency, to make easy for the adjustment of optical system and to establish the automatic inspection system for the production line, by constituting the detector that the scattered light due to surface deficiency of silicon wafers and the like is fed to the photo detector via the radial fibers. CONSTITUTION:The detector is constituted with the lens 22 collecting the beam from the laser oscillation tube 4 and the fiber group 3 radially located with the direction to the position of the laser spot and the photo detection section providing the photo detector 3 on another end of the fiber group 3 is provided. Further, the laser tube 4 is supported orthogonal to the surface of the inspected object 1 with the holder 5, and the fiber 3 is inserted to the fixed fixture 9 having a plurality of insertion holes radially extended by taking the spot position as a center at the lower end of the holder 5. Further, the lens 22 is mounted between the lower end of the laser tube 4 and the fixture 9 so that the position can freely be adjusted up and down. |
