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发明名称
VERFAHREN UND VORRICHTUNG ZUR BESCHICHTUNG EINES OPTOELEKTRONISCHEN BAUELEMENTS
摘要
申请公布号
DE4109727(A1)
申请公布日期
1992.10.01
申请号
DE19914109727
申请日期
1991.03.25
申请人
STANDARD ELEKTRIK LORENZ AG, 7000 STUTTGART, DE
发明人
IDLER, WILFRIED, DIPL.-PHYS., 7144 ASPERG, DE
分类号
H01L21/66;G01R29/26;H01S5/00;H01S5/022;H01S5/028;H01S5/18
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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