| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable separation and capture of each of a plurality of decomposition products from an exhaust gas, by providing a trap for capturing decomposition products of a material gas from an exhaust gas after reaction, with respect to each of at least two types of gases. SOLUTION: In the case where arsenic and phosphorus are used as material gases, an exhaust gas of the material gases which contributed to growth in a reactor 1 is fed together with carrier gases such as nitrogen and hydrogen into an arsenic trap 3 as a first trap through an exhaust pipe 2. The arsenic trap 3 is held at approximately 50 deg.C, for example. A dust removing filter 4 is arranged after the arsenic trap 3, thus restraining blocking in a pipe arrangement, such as a gate valve 5 and an air operating valve 6 on the subsequent stage. On the subsequent stage of a butterfly valve 7 for pressure control provided on the subsequent stage of the valves 5, 6, a phosphorus trap 8 as a second trap is provided. The phosphorus trap 8 may be cooled to approximately 5 deg.C, for example.</p> |
