发明名称 ANNEAL APPARATUS
摘要 PROBLEM TO BE SOLVED: To heat a member to be heated, regardless of whether or not the member to be heated has conductivity, in a configuration using an electric current.SOLUTION: A current control part 40 controls to run through each of a plurality of rod-like members 10 with conductivity so that each of the plurality of rod-like members 10 is heated. A movement control part 50 controls to move the plurality of rod-like members 10 so that the plurality of heated rod-like members 10 are in contact with a member W1 to be heated.SELECTED DRAWING: Figure 1
申请公布号 JP2016162984(A) 申请公布日期 2016.09.05
申请号 JP20150043084 申请日期 2015.03.05
申请人 MITSUBISHI ELECTRIC CORP 发明人 MAEDA MASARU;MARUYAMA JOJI
分类号 H01L21/265 主分类号 H01L21/265
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