PLASMA TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a plasma treatment apparatus capable of accurately determining the arrival of the timing of appropriate maintenance necessary for optimally maintaining the operation state of the apparatus.

SOLUTION: A discharge detection sensor 23 combining a dielectric member 21 and a probe electrode unit 22 is attached into an opening 2a disposed in a lid 2 composing a vacuum chamber to receive a potential change caused in a probe electrode 22b depending on the change of plasma discharge; and the necessity of maintenance is determined by comparing a count rate which is the number of times of detection of a V-type waveform with a specific V-shaped pattern due to leak discharge correlating with adhesion of foreign materials in the vacuum chamber by a V-type waveform detector 35 by a leak discharge waveform counter 39, with a tolerance beforehand set by a maintenance determination portion 44.

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