| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic sensor capable of maintaining good acoustic properties, while achieving high density of ultrasonic sensor elements.SOLUTION: Assuming that two axes orthogonal to each other are X axis and Y axis, a plane formed by the X axis and Y axis is an XY plane, an ultrasonic sensor includes a substrate 10 along the XY plane, a plurality of spaces 12 formed in the substrate 10 in at least one of the X axis direction and Y axis direction, a diaphragm 50 provided on the substrate 10 so as to close the spaces 12, and having a first surface 50a on the substrate 10 side and a second surface 50b opposite to the first surface 50a, and piezoelectric elements 300 provided at the parts of the second surface 50b of the diaphragm 50 corresponding to the spaces 12, and transmitting and/or receiving ultrasonic waves. Some of the spaces 12 are formed in zigzag.SELECTED DRAWING: Figure 2 |
