发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To planarize the surface of a bump electrode. SOLUTION: A semiconductor device, where a gold bump electrode 57 is formed on a pad 53 formed above a semiconductor substrate, comprises the pad 53 consisting of a plurality of openings provided in a passivation film 52 covering a pad forming region, a conductive film 55 that is buried in the openings to constitute the pad 53, and the gold bump electrode 57 that comes into contact with the pad 53 via the conductive film 55.</p>
申请公布号 JP2003017522(A) 申请公布日期 2003.01.17
申请号 JP20010196004 申请日期 2001.06.28
申请人 SANYO ELECTRIC CO LTD 发明人 SHINOKI HIROYUKI;TANIGUCHI TOSHIMITSU
分类号 H01L23/52;H01L21/3205;H01L21/60;H01L21/822;H01L21/8238;H01L23/485;H01L27/04;H01L27/092;H01L29/78;(IPC1-7):H01L21/60;H01L21/823;H01L21/320 主分类号 H01L23/52
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