Integrated chemical sensor chip

摘要

An integrated chemical sensor chip comprises on or integrated in a common substrate a chemically sensitive layer and a heater heating the sensitive layer. In addition, a memory is provided for the storage of a measurement routine, the measurement routine comprising instructions defining a heating process over time and instructions defining one or more measurement points in time. An I/O interface is provided for receiving a trigger for the measurement routine and for supplying a result of the measurement routine. An engine controls the heater and measures a resistance of the sensitive layer according the instructions of the measurement routine.

主权项

1. An integrated chemical sensor chip, comprising on or integrated in a common substrate
a chemically sensitive layer, a heater for heating the sensitive layer, a memory for the storage of a measurement routine, the measurement routine comprising instructions defining a heating process over time and instructions defining one or more measurement points in time, an I/O interface for receiving a trigger for the measurement routine and for supplying a result of the measurement routine, and an engine for controlling the heater and for measuring a resistance of the sensitive layer according to instructions of the measurement routine in response to receiving a trigger for the measurement routine, wherein the engine is electrically interconnected with the sensitive layer and the heater on or in the substrate in an integrated circuit through which the engine receives a trigger as aforesaid and executes heating of the heater and taking measurements of the resistance of the sensitive layer.