发明名称 Offset-Printing Method for Three-Dimensional Package
摘要 The present invention discloses an offset-printing method for a three-dimensional 3D-oP (three-dimensional offset-printed memory)-based package. The mask-patterns for different 3D-op dice are merged onto a same data-mask. At different printing steps, a wafer is offset by different values with respect to the data-mask. Accordingly, data-patterns from a same data-mask are printed into different 3D-oP dice.
申请公布号 US2017098651(A1) 申请公布日期 2017.04.06
申请号 US201615381080 申请日期 2016.12.15
申请人 ZHANG Guobiao 发明人 ZHANG Guobiao
分类号 H01L27/102;G11C11/56;H01L27/112;H01L21/8229;H01L21/822 主分类号 H01L27/102
代理机构 代理人
主权项 1. An offset-printing method for a three-dimensional 3D-oP (three-dimensional offset-printed memory)-based package, comprising the steps of: 1) forming a substrate circuit on a semiconductor wafer, wherein said wafer comprises at least first, second and fourth 3D-oP dice, with said second 3D-oP die adjacent to said first 3D-oP die along the y direction and said fourth 3D-oP die adjacent to said first 3D-oP die along the x direction; 2) a first printing step for transferring a first plurality of mask patterns to a first data-coding layer in said first, second and fourth 3D-oP dice, wherein the origin of said data-mask is initially aligned to the origin of said first die at said first printing step; 3) a second printing step for transferring a second plurality of mask patterns to a second data-coding layer in said first, second and fourth 3D-oP dice, wherein the origin of said data-mask is initially aligned to the origin of said second die at said second printing step; wherein said first and second plurality of mask patterns are from a same data-mask; and said first and fourth 3D-oP dice are vertically stacked in said 3-D package.
地址 Corvallis OR US