PASSIVE PRESSURE SENSING

摘要

A pressure sensor for sensing pressure of a fluid includes a diaphragm separator and a flexure structure. The diaphragm separator exerts an imparted force on the flexure structure, where the imparted force is proportional to fluid pressure exerted on the flexure structure. The pressure sensor further includes a piezoelectric resonator. A first resonator interface section of the flexure structure is in contact with a first edge of the piezoelectric resonator. A second resonator interface section of the flexure structure is in contact with a second edge of the piezoelectric resonator. The first edge and the second edge are opposite narrow edges of the piezoelectric resonator. The flexure structure exerts a load proportional to the imparted force onto the first edge of the piezoelectric resonator.

主权项

1. A pressure sensor for sensing pressure of a fluid, the pressure sensor comprising:
a diaphragm separator; a flexure structure, wherein the diaphragm separator exerts an imparted force on the flexure structure, wherein the imparted force is proportional to fluid pressure exerted on the flexure structure; and a piezoelectric resonator, wherein a first resonator interface section of the flexure structure is in contact with a first edge of the piezoelectric resonator, wherein a second resonator interface section of the flexure structure is in contact with a second edge of the piezoelectric resonator, wherein the first edge and the second edge are opposite narrow edges of the piezoelectric resonator, and wherein the flexure structure exerts a load proportional to the imparted force onto the first edge of the piezoelectric resonator.