发明名称 |
Process for synthesizing a thin film or composition layer via non-contact pressure containment |
摘要 |
A process for synthesizing a thin film or composition layer from a plurality of precursor layers supported on a substrate, includes exposing the plurality of precursor layers to non-contact pressure, and heating the plurality of precursor layers under the non-contact pressure to a reaction temperature sufficient to promote the formation of the film or composition layer.
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申请公布号 |
US2010310770(A1) |
申请公布日期 |
2010.12.09 |
申请号 |
US20100661923 |
申请日期 |
2010.03.26 |
申请人 |
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发明人 |
SANG BAOSHENG;ELDADA LOUAY;LIM ABNER;TAYLOR MATTHEW |
分类号 |
C23C16/44;B05D3/00;B05D3/02 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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