发明名称 Process for synthesizing a thin film or composition layer via non-contact pressure containment
摘要 A process for synthesizing a thin film or composition layer from a plurality of precursor layers supported on a substrate, includes exposing the plurality of precursor layers to non-contact pressure, and heating the plurality of precursor layers under the non-contact pressure to a reaction temperature sufficient to promote the formation of the film or composition layer.
申请公布号 US2010310770(A1) 申请公布日期 2010.12.09
申请号 US20100661923 申请日期 2010.03.26
申请人 发明人 SANG BAOSHENG;ELDADA LOUAY;LIM ABNER;TAYLOR MATTHEW
分类号 C23C16/44;B05D3/00;B05D3/02 主分类号 C23C16/44
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