METHOD FOR MANUFACTURING OPTIMAL DRIVING TYPE PIEZO-ELECTRIC MEMBRANE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an optimal driving type piezo-electric membrane.

SOLUTION: In the method for manufacturing the membrane, a thin film multi-layer including a piezo-electric material film 30 placed between an upper electrode film Etop and a lower electrode film Ebot and an elastic film 30 for supporting the piezo-electric film is constituted on a substrate 10. The method for manufacturing the membrane includes a step for defining a first area and a second area corresponding to a recessed portion and projection portion or the converse of them by determining at least one recessed surface/projection surface curvature of the membrane along an axis parallel to a flat surface of the film in the form that at least one inflection point is defined; a step for depositing the thin film multi-layer including the piezo-electric material film, the lower electrode film and the upper electrode film onto a substrate surface; and a step for making a structure of at least one of the electrode films so as to define a first membrane area where an electric field vertical to the film surface is applied to the inside and a second area where an electric field parallel to the flat surface of the film is applied.

COPYRIGHT: (C)2011,JPO&INPIT