发明名称 FIELD ASYMMETRIC ION MOBILITY SPECTROMETRY FILTER
摘要 Ion filter for FAIMS fabricated using the LIGA technique. The ion filter is manufactured using a metal layer to form the ion channels and an insulating support layer to hold the structure rigidly together after separation of the metal layer into two electrodes.
申请公布号 US2015028196(A1) 申请公布日期 2015.01.29
申请号 US201314369121 申请日期 2013.01.03
申请人 Toutoungi Danielle;Hart Matthew;Somerville John;Pearson Jon;Allsworth Max;Orrell Richard;Negri Antoni;Spinks Jeremy;Holden Martin;Koehl Andrew H.;Taylor Alistair 发明人 Toutoungi Danielle;Hart Matthew;Somerville John;Pearson Jon;Allsworth Max;Orrell Richard;Negri Antoni;Spinks Jeremy;Holden Martin;Koehl Andrew H.;Taylor Alistair
分类号 H01J49/06;G01N27/62 主分类号 H01J49/06
代理机构 代理人
主权项 1. A ion filter, comprising: at least one metal electrode layer; at least one ion channel formed through the at least one electrode layer; and at least one support layer adjacent the at least one electrode layer and configured to maintain regions of the at least one electrode layer in fixed relative positions, the at least one support layer including an aperture formed therein configured to permit gas to flow therethrough.
地址 Cambridge GB