发明名称 電子線トモグラフィ法
摘要 <p>The invention relates to an improved method of electron tomography. Electron tomography is a time consuming process, as a large number of images, typically between 50 - 100 images, must be acquired to form one tomogram. The invention teaches a method to shorten the time needed to acquire this amount images much more quickly by tilting the sample continuously, instead of step-by-step. Hereby the time needed to reduce vibrations between steps is eliminated.</p>
申请公布号 JP5820020(B2) 申请公布日期 2015.11.24
申请号 JP20140116739 申请日期 2014.06.05
申请人 发明人
分类号 H01J37/26;H01J37/20;H01J37/22 主分类号 H01J37/26
代理机构 代理人
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