半導体基板、半導体基板の製造方法、および電磁波発生装置,申请号JP20110053420-传众专利搜索

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发明名称	半導体基板、半導体基板の製造方法、および電磁波発生装置
摘要
申请公布号	JP5738022(B2)	申请公布日期	2015.06.17
申请号	JP20110053420	申请日期	2011.03.10
申请人		发明人
分类号	H01L21/205;H01L21/20;H01S1/02	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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