发明名称 インターポーザ用の金属張積層板とそれを用いた半導体パッケージ
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a metal-clad laminated plate for an interposer which can suppress the warpage of a semiconductor package both at a normal temperature and during heating, and provide the semiconductor package using the same. <P>SOLUTION: A metal-clad laminated plate is used for an interposer of a semiconductor package with one side sealed includes at least an insulating resin layer containing a glass cloth of a base material and a metal foil provided on the outermost surface. The insulating resin in the insulating resin layer contains a thermosetting resin and an inorganic filler as essential components. The glass transition temperature by a DMA method of the insulating resin is 240 to 310°C, and the flexural modulus of a portion except the metal foil at 250°C is 10 GPa or more. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP5696302(B2) 申请公布日期 2015.04.08
申请号 JP20090221476 申请日期 2009.09.25
申请人 发明人
分类号 H01L23/32;H01L23/14;H05K1/03 主分类号 H01L23/32
代理机构 代理人
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