OPTICAL DEVICE, PROJECTION OPTICAL SYSTEM, EXPOSURE DEVICE, AND MANUFACTURING METHOD OF ARTICLE

摘要

PROBLEM TO BE SOLVED: To reduce the deterioration of shape control accuracy which is caused by temperature change of magnets in an optical device where a shape of a reflection surface of a mirror may vary.SOLUTION: An optical device includes: a mirror; a base which is placed spaced away from a rear surface of the mirror; a mirror support member which connects with the mirror and the base and supports the mirror; multiple actuators which are provided between the mirror and the base and used for varying a shape of a reflection surface of the mirror; an intermediate member coupled to the rear surface of the mirror; and a cooling part which is provided at the intermediate member and recovers heat from the multiple actuators.