| 摘要 |
<p>The purpose of the present invention is to provide a nanostructured composite thin film and a manufacturing method thereof, and a low frictional member and a manufacturing method thereof, wherein the nanostructured composite film not only has a largely improved frictional property but also high hardness and adherence. According to an aspect of the present invention, provided is the nanostructured composite film with low frictional properties which has a composite structure wherein a nitride phase contains Zr and Al as nitride-forming elements and at least one metal phase are mixed, is added with at least one selected from a group consisting of P and S, and is a thin film of which the grain size is in a range of 5-30 nm wherein the nitride phase with a crystalline structure of a Zr nitride further contains at least one selected from a group consisting of Cr, Mo, Si, Nb, Hf, Ti, V, and Fe as the nitride-forming elements, and the metal phase contains at least one selected from a group consisting of Cu and Ni and at least one selected from a group consisting of Co, Sn, In, Bi, Zn, and Ag.</p> |
