发明名称 HERMETIC WAFER-TO-WAFER BONDING WITH ELECTRICAL INTERCONNECTION
摘要 AN IMPLANTABLE MEDICAL DEVICE (IMD) IS DISCLOSED. THE IMD INCLUDES A FIRST SUBSTRATE (300A) HAVING A FRONT SIDE (302A) AND A BACKSIDE (302B). A FIRST VIA IS FORMED IN THE FRONT SIDE, THE VIA EXTENDING FROM A BOTTOM POINT IN THE FRONT SIDE TO A FIRST HEIGHT LOCATED AT A SURFACE OF THE FRONT SIDE. A FIRST CONDUCTIVE PAD IS FORMED IN THE FIRST VIA, THE FIRST CONDUCTIVE PAD HAVING AN EXPOSED TOP SURFACE LOWER THAN FIRST HEIGHT. A SECOND SUBSTRATE (300B) IS COUPLED TO THE FIRST SUBSTRATE (300A), THE SECOND SUBSTRATE HAVING A SECOND VIA FORMED IN THE FRONT SIDE, THE VIA EXTENDING FROM A BOTTOM POINT IN THE FRONT SIDE TO A SECOND HEIGHT LOCATED AT A SURFACE OF THE FRONT SIDE. A SECOND CONDUCTIVE PAD IS FORMED IN THE SECOND VIA, THE SECOND CONDUCTIVE PAD HAVING AN EXPOSED TOP SURFACE LOWER THAN SECOND HEIGHT. THE COUPLED SUBSTRATES ARE HEATED UNTIL A PORTION OF ONE OR BOTH CONDUCTIVE PADS REFLOW, DEWET, AGGLOMERATE, AND MERGE TO FORM AN INTERCONNECT (340B), HERMETIC SEAL, OR BOTH DEPENDING ON THE REQUIREMENTS OF THE DEVICE. (FIG.1)
申请公布号 MY152833(A) 申请公布日期 2014.11.28
申请号 MY2012PI04728 申请日期 2011.04.28
申请人 MEDTRONIC, INC. 发明人 RUBEN, DAVID, A.;MATTES, MICHAEL, F.;SMITH, JONATHAN, R.
分类号 A61N1/00 主分类号 A61N1/00
代理机构 代理人
主权项
地址