| 摘要 |
<p>The present invention relates to a source gas injection nozzle for a vacuum deposition apparatus. According to an embodiment of the present invention, the source gas injection nozzle for a vacuum deposition apparatus comprises: a connection pipe where a source gas supplying part for supplying a source gas is connected to one side; a first gas moving pipe having a pipe hole where one end of the connection pipe is connected at the outer peripheral surface to be connected with the connection pipe, and a first injection hole for injecting a source gas flowing through the connection pipe; and a second gas moving pipe having a first inserting hole accommodating the first gas moving pipe therein, and into which a fixed part of the connection pipe is inserted to connect one end of the connection pipe with the pipe hole of the first gas moving pipe at the outer peripheral surface, and a second injection hole for injecting a source gas flowing from the first gas moving pipe.</p> |
