| 摘要 |
PROBLEM TO BE SOLVED: To provide a MEMS gyroscope capable of reducing rate bias errors and scale factor errors, and methods therefor.SOLUTION: A plurality of drive elements cause a proof mass to oscillate along a drive axis perpendicular to the direction in which Coriolis force is sensed, the drive elements driving at least one substrate 68 including one or more horizontal drive electrodes 92, 94, 96, 98 and movable electrodes 64, 66 vertically separate from and adjacent to the one or more horizontal drive electrodes 92, 94, 96, 98, thereby reducing rate bias errors and scale factor errors resulting from displacement of the movable electrodes 64, 66 in the direction of a sense axis 72 of a device. |
