| 摘要 |
<p>A scanning probe microscope comprises a base, a positioning stage mounted on the base, a platform mounted on the positioning stage and a probe tip on the platform, the positioning stage comprising
- a first and second linear displacement actuator, each having a main direction of displacement, the main directions of displacement of the first and second linear displacement actuator being oriented substantially parallel to each other,
- a first and second strut or struts coupled directly or indirectly between the platform and ends of the first and second actuators where the first and second actuators terminate in the main direction of displacement respectively, at least the first strut or struts being directed at an oblique angle to the main direction of displacement of the actuators.</p> |
