| 摘要 |
PROBLEM TO BE SOLVED: To provide a dimension measuring instrument suppressing a mistake in corresponding points between a reference pattern and an evaluation object pattern.SOLUTION: According to the present invention, the dimension measuring instrument measures a dimension between first profile data to be an evaluation criterion of an evaluation object pattern and second profile data of the evaluation object pattern. When a point on the first profile data and a point on the second profile data are associated with each other, the dimension measuring instrument generates first correspondence information of the point on the first profile data and the point on the second profile data, determines consistency of the correspondence contained in the first correspondence information, corrects the correspondence the consistency of which is not verified, and generates second correspondence information. |
