| 发明名称 |
Extreme UV radiation generating device comprising a corrosion-resistant material |
| 摘要 |
The invention relates to an improved EUV generating device having coated supply pipes for the liquid tin, in order to provide an extreme UV radiation generating device which is capable of providing a less contaminated flow of tin to and from a plasma generating part. |
| 申请公布号 |
US8519367(B2) |
申请公布日期 |
2013.08.27 |
| 申请号 |
US200913000733 |
申请日期 |
2009.07.01 |
| 申请人 |
METZMACHER CHRISTOF;WEBER ACHIM;KONINKLIJKE PHILIPS N.V.;XTREME TECHNOLOGIES GMBH |
发明人 |
METZMACHER CHRISTOF;WEBER ACHIM |
| 分类号 |
H01J35/20 |
主分类号 |
H01J35/20 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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