| 摘要 |
PURPOSE: A chuck for holding a substrate is provided to improve quality of a device by attaching large size substrate to a substrate holder without a separate component. CONSTITUTION: Adhesive(120) of a checked pattern is formed on one side of a substrate holder(110) by using a mask pattern or printing adhesive of liquid state. A substrate holder is adhered by the adhesive. A film or a plate in which a checked pattern is formed is attached on the other side of the substrate holder. The film is eliminated except for the checked pattern through punching. |
