| 摘要 |
A property, such as a quality parameter, of a write pole in a write head is determined using an optical metrology device, where the write pole is smaller than the optical resolution limit of the metrology device. The metrology device produces polarized light that is reflected off the write pole while the write pole is magnetized either during or after excitation with a write current. The magnetization alters the polarization state of the light, which can be analyzed to transform the altered polarization state into intensity. The intensity of the light is detected over the point spread function of the optics in the metrology device and an intensity value is generated. The intensity value is used to determine the quality parameter of the write pole, e.g., by comparison to a threshold or reference intensity value, which may be generated empirically or theoretically. |
