| 摘要 |
PURPOSE: A lead frame of a substrate processing apparatus is provided to obtain a reliable support structure of a window by properly arranging four peripheral windows around a central window. CONSTITUTION: A lead frame(20) is composed of an outer frame(21) and a partition frame(25) comprising the external surfaces of a square frame. The partition frames are mutually connected in the outer frame and partition five windows(30). The window is composed of a central window(30A) and four peripheral windows(30B). An insulation plate(31) made of ceramic materials is inserted into the central window and the peripheral window. A plate support unit with a projection structure supports the outer surfaces of the insulation plate. |
