PRESSING APPARATUS AND METHDOD FOR MANUFACTURING CERAMIC SUBSTRATE HAVING CAVITY USING THE SAME

摘要

PURPOSE: A pressure apparatus and manufacturing method of a ceramic substrate including a cavity are provided to prevent damage to the cavity in a cavity production process. CONSTITUTION: A ceramic substrate(110) locates on a first press(101). One or more cavities(110a) are formed on the ceramic substrate. A pressure jig(102) corresponds to the cavity. A jig opening unit(121) including a smaller size than the cavity is formed in the pressure jig. The pressure jig locates one a ceramic sheet(120) accumulated on the ceramic substrate. The pressure jig corresponds to the jig opening unit and the cavity. A second press(103) pressurizes the pressure jig.