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经营范围
发明名称
sputtering apparatus
摘要
申请公布号
KR101174154(B1)
申请公布日期
2012.08.14
申请号
KR20050050258
申请日期
2005.06.13
申请人
发明人
分类号
C23C14/34;G02F1/13
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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