发明名称 |
PROFILE MEASURING APPARATUS, METHOD FOR MANUFACTURING STRUCTURE, AND STRUCTURE MANUFACTURING SYSTEM |
摘要 |
There is provided a profile measuring apparatus which measures a profile of an object including: a projection unit which projects a pattern on the object from a projection direction; a measurement unit, which is displaced at a difference position for the projection unit and takes an image of the pattern from a direction different from the projection direction to measure a position on a surface of the object based on an image data obtained with the taken image; an object-rotation unit which rotates the object in two directions; and a pattern-rotation unit which is connected to the projection unit so as to be able to rotate the pattern relative to the object-rotation unit. |
申请公布号 |
US2012105867(A1) |
申请公布日期 |
2012.05.03 |
申请号 |
US201113273265 |
申请日期 |
2011.10.14 |
申请人 |
KOMATSU MANABU |
发明人 |
KOMATSU MANABU |
分类号 |
G01B11/25;B23P17/04;B23P21/00 |
主分类号 |
G01B11/25 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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