METHOD FOR MANUFACTURING WORKING STAGE WITH CNT ANTISTATIC TREATMENT AND THE WORKING STAGE WITH CNT ANTISTATIC TREATMENT

摘要

PURPOSE: A method for antistatic treatment on a work stage and a work stage undergoing antistatic treatment are provided to control surface resistances and lower the frictional coefficient of a work stage. CONSTITUTION: A method for antistatic treatment on a work stage comprises the steps of: anodizing the surface of a metal work stage to form a plurality of oxidizing surface holes(S10), inserting carbon nano tubes in the oxidizing surface holes at least partially(S20), hardening the carbon nano tubes(S30), and sealing the holes of the work stage(S40).