发明名称 |
CURRENT-PERPENDICULAR-TO-THE-PLANE (CPP) MAGNETORESISTIVE (MR) SENSOR WITH IMPROVED INSULATION STRUCTURE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a current-perpendicular-to-the-plane (CPP) magnetoresistive (MR) sensor with improved insulation structure. <P>SOLUTION: A current-perpendicular-to-the-plane (CPP) magnetoresistive (MR) sensor, such as a CPP MR disk drive reading head, has an improved insulation structure that surrounds a stack of layers constituting a sensor. The sensor has a first silicon nitride layer having the thickness of about 1 to 5 nm on side edges of the sensor and on regions of a bottom shielding layer adjacent to the sensor below a ferromagnetic bias layer of the sensor. The sensor has a second silicon nitride layer having the thickness of about 2 to 5 nm on a rear edge of the sensor and on the region of the bottom shielding layer adjacent to the rear edge of the sensor and a metal oxide layer being substantially thicker on the second silicon nitride layer. The insulation structure prevents edge damage around the sensor, and thus allows for the fabrication of a CPP MR reading head having substantially small dimensions. <P>COPYRIGHT: (C)2012,JPO&INPIT |
申请公布号 |
JP2012059345(A) |
申请公布日期 |
2012.03.22 |
申请号 |
JP20110157665 |
申请日期 |
2011.07.19 |
申请人 |
HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS BV |
发明人 |
IMINE SOO;CHAEG-I HOAN;SIMON HUNG CHUNG RYAO;MAAT STEFAN |
分类号 |
G11B5/39;H01L43/08;H01L43/10 |
主分类号 |
G11B5/39 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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