发明名称 |
MICROELECTROMECHANICAL OPTICAL SWITCH AND METHOD OF MANUFACTURE THEREOF |
摘要 |
A MEMS-based optical switch having improved characteristics and methods for manufacturing the same are provided. In accordance with one embodiment, an optical switch includes a single comb drive actuator having a deflecting beam structure and a mirror coupled to the actuator. The mirror is capable of being moved between an extended position interposed between waveguide channels and a retracted position apart from the waveguide channels. The actuator applies a force capable of deflecting the beam structure and moving the mirror to one of the extended positions or the retracted position and the beam structure returns the mirror to the other of the extended position or the retracted position in the absence of the application of force. |
申请公布号 |
PL200407(B1) |
申请公布日期 |
2009.01.30 |
申请号 |
PL20000354707 |
申请日期 |
2000.08.01 |
申请人 |
ADC TELECOMMUNICATIONS, INC. |
发明人 |
ZHANG NAN |
分类号 |
G02B26/02;B81B3/00;B81B7/02;B81C1/00;G02B6/35;H02N1/00 |
主分类号 |
G02B26/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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