METHOD AND ARRANGEMENT FOR THE OPERATION OF PLASMA-BASED SHORT-WAVELENGTH RADIATION SOURCES.,申请号NL20092003480-传众专利搜索

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发明名称	METHOD AND ARRANGEMENT FOR THE OPERATION OF PLASMA-BASED SHORT-WAVELENGTH RADIATION SOURCES.
摘要
申请公布号	NL2003480(C)	申请公布日期	2011.10.04
申请号	NL20092003480	申请日期	2009.09.14
申请人	XTREME TECHNOLOGIES GMBH,	发明人	SCHUERMANN, MAX CHRISTIAN;TKACHENKO, BORIS;BOLSHUKHIN, DENNIS;KLEINSCHMIDT, JUERGEN;SCHRIEVER, GUIDO
分类号	H05G2/00	主分类号	H05G2/00
代理机构		代理人
主权项
地址

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