| 摘要 |
PROBLEM TO BE SOLVED: To accurately and rapidly evaluate the degree of edge roughness from an SEM observation image of a fine line pattern with much noise, by calculating the contribution of the random noise of an apparatus, of a measured index of roughness, based on one image data item and calculating the degree of edge roughness actually existing in a pattern by subtracting the roughness caused by the apparatus from a measurement value of the edge roughness index. SOLUTION: A quantity (dispersion value) of a distribution of an edge position due to random noise is reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with various values of parameter S, and then the edge roughness index is calculated. The S-dependence of the edge roughness index is analyzed and a term of a dispersion value directly proportional to 1/S is determined as being due to noise. COPYRIGHT: (C)2011,JPO&INPIT |
