发明名称 METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE
摘要 A method for fabricating a semiconductor device includes forming a first semiconductor layer on a front side of the semiconductor substrate. Additional semiconductor layers may be formed on a font side of the first semiconductor layer. The substrate is subsequently removed. In some embodiments, one or more additional semiconductor layers may be formed on the back side of the first semiconductor layer after the semiconductor substrate has been removed. Additionally, in some embodiments, a portion of the first semiconductor layer is removed along with the semiconductor substrate. In such embodiments, the first semiconductor layer is subsequently etched to a known thickness. Source regions and device electrodes may be then be formed.
申请公布号 US2011151649(A1) 申请公布日期 2011.06.23
申请号 US20100961410 申请日期 2010.12.06
申请人 PURDUE RESEARCH FOUNDATION 发明人 COOPER JAMES A.;WANG XIAOKUN
分类号 H01L21/20 主分类号 H01L21/20
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