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发明名称
PROCEDE DE FABRICATION DE COUCHES DE MATERIAU EPITAXIE
摘要
申请公布号
FR2926672(B1)
申请公布日期
2010.03.26
申请号
FR20080050362
申请日期
2008.01.21
申请人
S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES
发明人
FAURE BRUCE;MARCOVECCHIO ALEXANDRA
分类号
H01L21/36;H01L21/477
主分类号
H01L21/36
代理机构
代理人
主权项
地址
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