SOLAR CELL MANUFACTURING METHOD, SOLAR CELL MANUFACTURING DEVICE, AND SOLAR CELL

摘要

Disclosed is a solar cell manufacturing method in which an anti-reflection film (22) containing a conductive dopant different than that of a silicon substrate (1) which has p-type or n-type conductivity is formed on the silicon substrate (1), the anti-reflection film (22) is heat treated, and the dopant contained in the anti-reflection film (22) is diffused into the silicon substrate (1).