| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem wherein a frame rate becomes low when using a camera of high resolution for imaging an microscopic image, and wherein image quality deteriorates when using a camera of low resolution, in a prior art, in a visual inspection device for a semiconductor wafer. SOLUTION: This image acquisition display is provided with an image-focusing optical system for forming an image of a specimen, an imaging part for picking up an image observed by the image-focusing optical system, a display part for displaying the image picked up by the imaging part, and a moving part for moving the specimen with respect to the image-focusing optical system, and is further provided with a change detecting part for detecting a change of the image acquisition display or a change of the image picked up by the imaging part, and a resolution control part for setting the resolution, based on a detection result from the change detecting part, and for controlling the image to be output to the display part in response to the resolution. COPYRIGHT: (C)2009,JPO&INPIT
|
