发明名称 SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device having a magnetic memory element which is free from an adverse influence on a peripheral region other than a memory cell region, and to provide a manufacturing method thereof. SOLUTION: A memory cell has an insulating film 13 formed over the entire surface on an interlayer insulating film 4 including a bit line portion BL1, and also has, on the insulating film 13, a high-magnetic-permeability film 14 formed in a region corresponding to a formation position of the bit line portion BL1 and a high-magnetic-permeability film 12. An interlayer insulating film 15 is formed over the entire surface on the insulating film 13 including the high-magnetic-permeability film 14. In a peripheral circuit region, on the other hand, the insulating film 13 is deposited over the entire surface including a part over a bit line 10. On the insulating film 13, the interlayer insulating film 15 is formed directly and the high-magnetic-permeability film 14 is not formed. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009038221(A) 申请公布日期 2009.02.19
申请号 JP20070201547 申请日期 2007.08.02
申请人 RENESAS TECHNOLOGY CORP 发明人 TAKEUCHI YOSUKE;UENO SHUICHI
分类号 H01L21/8246;H01L27/105;H01L43/08 主分类号 H01L21/8246
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