| 发明名称 |
Test probe alignment apparatus |
| 摘要 |
Test probe alignment apparatus for the alignment of test probes for testing integrated circuits includes three separate stages in which the theta stage is separate from the X-Y stage and the Z stage is separate from both the theta stage and the X-Y stage.
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| 申请公布号 |
US4266191(A) |
申请公布日期 |
1981.05.05 |
| 申请号 |
US19790031192 |
申请日期 |
1979.04.18 |
| 申请人 |
SPANO, JOHN D.;BARNETT, DANNY R. |
发明人 |
SPANO, JOHN D.;BARNETT, DANNY R. |
| 分类号 |
G01R31/28;(IPC1-7):G01R31/22 |
主分类号 |
G01R31/28 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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