CHARGED PARTICLE BEAM ADJUSTMENT METHOD, AND CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a beam condition adjustment method suitable for adjusting a beam condition in a condition different from that of a vertical beam particularly in beam inclination, in a device used for obtaining an image by irradiating a sample with a charged particle beam; and its device. SOLUTION: This device is provided with a control device automatically controlling an astigmatic correction unit, an object lens and a deflector to execute astigmatic correction, focus adjustment and visual field displacement correction, and also provided with a selection means for prohibiting execution of at least one of the astigmatic correction, the focus adjustment and the visual field displacement correction. COPYRIGHT: (C)2009,JPO&INPIT