| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of efficiently manufacturing deformable mirrors of which the shape of a mirror surface is variable by extension and contraction of a piezoelectric actuator. <P>SOLUTION: The method of manufacturing the deformable mirrors 1 includes a step in which a base member from which a plurality of bases 2 are obtained by being cut along predetermined separation parts, a mirror substrate member from which a plurality of mirror substrates 3 are obtained by being cut along predetermined separation parts while stacked on the base member, and a fixing part member of which the all of or a part of cut pieces become fixing parts 4 when being cut along the predetermined separation parts while arranged on the base member 11 are simultaneously cut to obtain a plurality of the deformable mirrors 1. <P>COPYRIGHT: (C)2009,JPO&INPIT |
