Laser Bearbeitungsvorrichtung und -verfahren mit Bildaufnahme und -verarbeitungsmittel

摘要

The invention relates to a laser beam machine of the present invention, the latter includes: an XY stage (32) on which to rest a workpiece (200) with multiple machining objects (201) arrayed on it, and which moves the workpiece (200) in an XY direction on the basis of NC data; an image acquisition head (10) which is provided in an image acquisition station and has oblique illumination optical system and detection optical system (17); and a laser machining head (20) which is provided in a laser machining station and has a laser light source (21), an XY optical beam deflector (22) for deflecting a laser beam in the XY direction on the basis of the deflection control data obtained in accordance with the image signals from each machining object (201) that have been acquired by the image acquisition head (10), and an irradiation lens (23) for admitting the above-deflected laser beam into each machining object (201) from a substantially perpendicular direction.