| 摘要 |
A tester for a semiconductor manufacturing apparatus is provided to test the operation of semiconductor manufacturing apparatus before the semiconductor manufacturing apparatus is equipped at the work site. A tester for a semiconductor manufacturing apparatus comprises a receiving part(111) in which a sensor part is positioned; at least one ramp(120) which is electrically connected with the sensor part of semiconductor device manufacturing apparatus; sensor units(130a,130a') which are installed while facing to the sensor units(130b,130b') and send and receive the signal; at least one switch ramp which displays the operation state of the sensor units, and determines the sending and receiving signals according to the on/off operation. The semiconductor device manufacturing apparatus is a probe station device for testing the both ends of semiconductor device formed on the wafer.
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