发明名称 METHOD FOR REGENERATING HARD FILM-COATED METALLIC MEMBER
摘要 PROBLEM TO BE SOLVED: To provide a method for regenerating a hard film-coated metallic member where a hard film coating is inexpensively and easily removed without damaging a base material, and the regeneration of a hard film-coated metallic member can be performed. SOLUTION: By the provision of a stage where a metallic member applied with a hard film coating by PVD or CVD is heated and held in an atmosphere where a halogen based gas is present, and the hard film coating in the surface is made into a halide, so as to be removed, the hard film coating is removed in a time remarkably shorter than that in the conventional chemical treatment, and the metallic component can be regenerated. Further, since not a plasma atmosphere as in the conventional case but a heating atmosphere is utilized, expensive equipment is needless, and the regeneration treatment can be extremely inexpensively performed. Further, even if the base material is made of a cemented carbide, there is no generation of the damage and roughening in the base material caused by Co elution as in the conventional chemical treatment, thus adverse influence does not exert on the wear resistance or the like of the metallic component after the regeneration. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008150676(A) 申请公布日期 2008.07.03
申请号 JP20060340743 申请日期 2006.12.19
申请人 AIR WATER INC 发明人 AOKI KANJI
分类号 C23F4/00;B23P15/28;C23C14/58;C23C16/56 主分类号 C23F4/00
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