发明名称 HIGH WITHSTAND VOLTAGE TRANSISTOR AND MANUFACTURING METHOD THEREOF, AND SEMICONDUCTOR DEVICE ADOPTING HIGH WITHSTAND VOLTAGE TRANSISTOR
摘要 <p>A high-withstand voltage transistor a semiconductor device having the same and a method for manufacturing the same are provided to prevent a gate oxide film from being damaged by a surge voltage/current. A gate electrode(4) is formed in a first trench(7) formed on a first conductive semiconductor substrate. A source(5) and a drain(6) are formed on both sides of the gate electrode. The source and the drain are apart from the gate electrode by a predetermined distance. First electric field relaxation layers(2) are formed on a wall of the trench on the side of the source and the drain. Second electric field relaxation layers(3) are formed between the source and the gate electrode to surround the source and drain. A withstand voltage of a drain/source diffusion layer is 1 to 3 V lower than that of a transistor.</p>
申请公布号 KR20080028296(A) 申请公布日期 2008.03.31
申请号 KR20070096118 申请日期 2007.09.20
申请人 SHARP KABUSHIKI KAISHA 发明人 HAYASHI KEIJI
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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