发明名称 FINE STAGE Z SUPPORT APPARATUS
摘要 An apparatus for supporting an object is disclosed. The apparatus includes an air bearing coupled to an air bellows. When used in a vacuum environment, the apparatus preferably includes an air bearing housing with vacuum to remove the pressurized fluid used in the air bearing.
申请公布号 WO2006052855(A3) 申请公布日期 2008.01.24
申请号 WO2005US40229 申请日期 2005.11.04
申请人 NIKON CORPORATION;BINNARD, MICHAEL, B.;HAZELTON, ANDREW, J.;WATSON, DOUGLAS, C.;ARAI, YOICHI 发明人 BINNARD, MICHAEL, B.;HAZELTON, ANDREW, J.;WATSON, DOUGLAS, C.;ARAI, YOICHI
分类号 G03B27/42;G03B27/58 主分类号 G03B27/42
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